STOCKER (WAFER & CASSETTE HANDLING SYSTEM) - 三和技研股份有限公司

up to 26 storage of FOUPs.
Connect with vertical furnace equipment to achieve fully automation process.
Utilizing advanced robotics and control software to achieve fully automated cassette storage, retrieval, and tracking operations.
Cooperating with camera and console devices to achieve off-machine teaching.
Purge system is available as an option at FOUP storage.
Equipment structure and communication protocol comply with SEMI standards.

Up to 21 storage shelves.
Connect with vertical furnace equipment to achieve fully automation process.
Utilizing advanced robotics and control software to achieve fully automated cassette storage, retrieval, and tracking operations.
Equipment structure and communication protocol comply with SEMI standards.
Load/Unload Interface:
1. SMIF Opener
2. OHT with SF Opener
3. Open Cassette I/O port

This system is a fully automatic transportation system that transports the wafer in the Cassettefrom cassette to the Shippingshipping box.
TakeTaking out the wafer from the Cassette, turncassette, turning it over and placeplacing it in the Shipping Box. The whole action isshipping box with the process completed by a special robot, no without the help of other organization is neededmechanisms.
Separate film shortage detection function.
Wafer holding with non-contact endeffectorend effector.

Customized front-end module for fully automatic 300mm wafer equipment up to 16 individual storage locations.
FOUP storage system with advanced robotics integrated in the technology to ensure faster and more reliable FOUP pick/placement.
N2/XCDA Purge system as an optional application for FOUP storage location.
Supporting SECS/GEN protocol and friendly GUI operation.
Built-in monitor video system.

Customized fully automatic 300mm wafer FOUP storage equipment up to 26 individual storage locations.
Advanced robotics featuring highly optimized motion and control software technology to achieve full automation of FOUP storage, retrieval and tracking operations.
In line with camera and manual operations for external teaching functions.
N2/XCDA Purge circulation mode.

This system is a●A fully automatic transportation system that transports the wafer in the Cassettefrom cassette to the Shippingshipping box.
TakeTaking out the wafer from the Cassette, turncassette, turning it over and placeplacing it in the Shipping Box. The whole action isshipping box with the process completed by a special robot, no without the help of other organization is neededmechanisms.
Separate film shortage detection function.
Wafer holding with non-contact endeffectorend effector.

Customized front-end module for fully automatic 300mm wafer equipment up to 16 individual storage locations.
FOUP storage system with advanced robotics integrated in the technology to ensure faster and more reliable FOUP pick/placement.
N2/XCDA Purge system as an optional application for FOUP storage location.
Supporting SECS/GEN protocol and friendly GUI operation.
Built-in monitor video system.