產品描述

• Up to 21 storage shelves.
• Connect with vertical furnace equipment to achieve fully automation process.
• Utilizing advanced robotics and control software to achieve fully automated cassette storage, retrieval, and tracking operations.
• Equipment structure and communication protocol comply with SEMI standards.
• Load/Unload Interface:
  1. SMIF Opener
  2. OHT with SF Opener
  3. Open Cassette I/O port