EFEM - 三和技研股份有限公司

Fully automatic transmission system corresponding to 4Port SMIF POD.
Fixed wafer transfer process with vacuum and edge-clamp types available to customers depending on actual needs.
Internal mini-environment cleanliness control verified by the CFD analysis with effective internal and external pressure-differential design to prevent from pollution in the wafer transfer process.
Optimized moving trajectory of the robot, enabling a speedy and stable transfer with the curve interpolation for the shortest route.
Complete data track to satisfy the requirement of predictive maintenance in Industry 4.0.

Fully automatic transmission system corresponding to 4Port SMIF POD.
Fixed wafer transfer process with vacuum and edge-clamp types available to customers depending on actual needs.
Internal mini-environment cleanliness control verified by the CFD analysis with effective internal and external pressure-differential design to prevent from pollution in the wafer transfer process.
Optimized moving trajectory of the robot, enabling a speedy and stable transfer with the curve interpolation for the shortest route.
Complete data track to satisfy the requirement of predictive maintenance in Industry 4.0.

Fully automatic transmission system corresponding to 4Port SMIF POD.
Fixed wafer transfer process with vacuum and edge-clamp types available to customers depending on actual needs.
Internal mini-environment cleanliness control verified by the CFD analysis with effective internal and external pressure-differential design to prevent from pollution in the wafer transfer process.
Optimized moving trajectory of the robot, enabling a speedy and stable transfer with the curve interpolation for the shortest route.
Complete data track to satisfy the requirement of predictive maintenance in Industry 4.0.

The equipment can be connected to OHT or AGV.
Wafer holding is basically vacuum suction or edge-clamp.
The internal mini-environment cleanliness control is verified by the CFD analysis, which ensures the internal and external pressure-differential design to prevent from pollution during the wafer transfer process.
The compact design can reduce footprint and saves costs.
Optimized moving track of the robot, enabling a speedy and stable transfer with the curve interpolation for the shortest route.
LOAD PORT configuation capability from 2 to 4 ports.
Optional with the high-speed wafer pre-aligner, which uses the dynamic image algorithm, can accurately and quickly allocate the wafer center and direction.
Optional with the optical and image processing & identification system,enhances the identification rate of wafer ID.
Complete data track to satisfy the requirement of predictive maintenance of Industry 4.0.
Customized services, discussions for customized specifications.

Fully automatic transmission system corresponding to 4Port SMIF POD.
Fixed wafer transfer process with vacuum and edge-clamp types available to customers depending on actual needs.
Internal mini-environment cleanliness control verified by the CFD analysis with effective internal and external pressure-differential design to prevent from pollution in the wafer transfer process.
Optimized moving trajectory of the robot, enabling a speedy and stable transfer with the curve interpolation for the shortest route.
Complete data track to satisfy the requirement of predictive maintenance in Industry 4.0.

The equipment can be connected to OHT or AGV.
Wafer holding is basically vacuum suction or edge-clamp.
LOAD PORT configuation capability from 2 to 4 ports.
Complete data track to satisfy the requirement of predictive maintenance of Industry 4.0.
Customized services, discussions for customized specifications.