close
Foup Stocker & Batch Type Wafer Handling System
供應情形： 有現貨
型號： C-3
Front-End Stocker System
Customized front-end module for fully automatic 300mm wafer equipment up to 16 individual storage locations.
FOUP storage system with advanced robotics integrated in the technology to ensure faster and more reliable FOUP pick/placement.
N2/XCDA Purge system as an optional application for FOUP storage location.
Supporting SECS/GEN protocol and friendly GUI operation.
Built-in monitor video system.