This system is a●A fully automatic transportation system that transports the wafer in the Cassettefrom cassette to the Shippingshipping box.
TakeTaking out the wafer from the Cassette, turncassette, turning it over and placeplacing it in the Shipping Box. The whole action isshipping box with the process completed by a special robot, no without the help of other organization is neededmechanisms.
Separate film shortage detection function.
Wafer holding with non-contact endeffectorend effector.