High-scalability variable pitch design, up to 4.5–15mm flexibility
Simultaneous transmission of both single and double arms
Composite AC servo and high-resolution stepper drive
Unique linear structure design with perfect smooth movement
Suitable for high cleanliness and compact space applications
Dual end-effector on a single arm with the same function as a dual arm robot.
3 port access of 300mm wafers complaint to SEMI standard.
High res AC servo actuator to all axes with absolute encoder.
Unique multi-axis kinematic control for great moving trajectory.
Perfect high speed smooth movement with sine-curve acceleration and deceleration control.
Advanced AC servo actuator.
±180° rotation capability to provide high flexibility.
Wafer mapping function (optional)
High-scalability variable pitch design, up to 4.5–15mm flexibility
Simultaneous transmission of both single and double arms
Composite AC servo and high-resolution stepper drive
Unique linear structure design with perfect smooth movement
Suitable for high cleanliness and compact space applications
Dual end-effector on a single arm with the same function as a dual arm robot.
3 port access of 300mm wafers complaint to SEMI standard.
High res AC servo actuator to all axes with absolute encoder.
Unique multi-axis kinematic control for great moving trajectory.
Perfect high speed smooth movement with sine-curve acceleration and deceleration control.
Advanced AC servo actuator.
±180° rotation capability to provide high flexibility.
Wafer mapping function (optional)
