High-scalability variable pitch design, up to 4.5–15mm flexibility

Simultaneous transmission of both single and double arms

Composite AC servo and high-resolution stepper drive

Unique linear structure design with perfect smooth movement

Suitable for high cleanliness and compact space applications

Dual end-effector on a single arm with the same function as a dual arm robot.

3 port access of 300mm wafers complaint to SEMI standard.

High res AC servo actuator to all axes with absolute encoder.

Unique multi-axis kinematic control for great moving trajectory.

Perfect high speed smooth movement with sine-curve acceleration and deceleration control.

Advanced AC servo actuator.

±180° rotation capability to provide high flexibility.

Wafer mapping function (optional)