Standard

• Drive by AC servo and stepping motors combined; wire saving system and equipped with high-resolution absolute encoders.
• Exclusive patented small-size variable pitch mechanism, capable of continuous control within the range of 4.5~15 mm spacing.
• Choose to perform single wafer and five-wafer handling operations.
• Connected to 200 mm Stocker and Vertical Furnace system, compatible with FOUPs with different pitches.