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SV Series
供應情形： 有現貨
型號： SS201
3-axis cylindrical coordinate articulated vacuum robot.
- All axes adapt closed-loop AC servo motor drive and are equipped with high-resolution absolute encoders.
- Uses magnetic fluid seal and bellow seal.
- Thin and lightweight upper arm, suitable for entering narrow gates.
- No dead angle in rotating.
- Optional AWC function for automatic correction of wafer position deviations.
供應情形： 有現貨
型號： SS201
2-axis cylindrical coordinate articulated vacuum robot for heavy loading.
- All axes adapt closed-loop AC servo motor drive and are equipped with high-resolution absolute encoders.
- Uses magnetic fluid seal.
- High load capacity, the third joint can bear up to 12 kgf.
- Optional AWC function for automatic correction of wafer position deviations.
供應情形： 有現貨
型號： SS201
4 axis cylindrical coordinate link type vacuum robot.
- Special DD motor structure design without rotating seal device, no rotating leakage issue.
- Built-in driver, no electric control box required.
- Optional AWC function for automatic correction of wafer position deviations.
- Optional relay point function to solve interference concern between the cylindrical coordinates and the inner wall of the cavity during moving process.
- Special linkage design allows dual motors to perform movements for the R-axis, L-axis, and Ɵ-axis.