ALIGNER - 三和技研股份有限公司

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State of the art

HA Vac Series

HA (Vac)

Adopting high●High-resolution CCD optical identification and localization system.
UnigueUnique algorithm for guickquick positioning and alignment.
Corresponding to transparent, ultra-thick, ultra-thin, warped wafer workpieces.
With greatGreat sensing capabilities which support on if the wafer hassupporting workpieces with a notch, flat, or dual flatsflat side workpiece.

► Product Details

HA Clamp Series

HA Clamp Series

HA (Clamp)

Edge gripping function without touching the backside of the wafer to minimize particle contamination.
Adjustable clamp force to reduce damage to the wafer edge.
Significantly reduced footprint.

► Product Details

HA Vac Series

HA (Vac)

Adopting high●High-resolution CCD optical identification and localization system.
UnigueUnique algorithm for guickquick positioning and alignment.
Corresponding to transparent, ultra-thick, ultra-thin, warped wafer workpieces.
With greatGreat sensing capabilities which support on if the wafer hassupporting workpieces with a notch, flat, or dual flatsflat side workpiece.

► Product Details

HA Clamp Series

HA Clamp Series

HA (Clamp)

Edge gripping function without touching the backside of the wafer to minimize particle contamination.
Adjustable clamp force to reduce damage to the wafer edge.
Significantly reduced footprint.

► Product Details