Vacuum chuck
150/ 200mm wafer with through-beam mapping sensor
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Carrying Size: 8" to 12"
Carrying Object: Si Wafer/Glass Wafer
Characteristics: Conductive Teflon Coating, Made of Alumian Ceramic, Customizable, Front-end Mapping function
Carrying Size: 8" to 12"
Carrying Object: Si Wafer/Glass Wafer
Characteristics: Conductive Teflon Coating, Made of Metal, Customizable, Available within ± 7mm of deflection