SMIF OPENER - 三和技研股份有限公司

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State of the art

SF Indexer

Loading/unloading the wefer

Multi-communication interface:
1. Built-in RS232 and Ethernet.
2. Parallel I/O, SECS I/II (optional).
SEMI Standard S2 approved.
Built-in wafer mapping and wafer protrusion detecting.
Easy installation, operation and maintenance.
Optional adapter available for applications on Open Cassettes.

► Product Details

SF Opener

Loading/unloading the cassette

Multi-communication interface:
1. Built-in RS232 and Ethernet.
2. Parallel I/O, SECS I/II (optional).
SEMI Standard S2 approved.
Built-in wafer mapping and wafer protrusion detecting.
Easy installation, operation and maintenance.
Optional adapter available for applications on Open Cassettes.

► Product Details

SF Indexer

Multi-communication interface
1. Built-in RS232, Ethernet;
2. Parallel IO,SECS I/II (optional).
Built-in wafer mapping ang wafer protrusion detection.
Easy installation, operation and maintenance.
Optional adapter available for open cassette operation.

► Product Details

SF Opener

Extension Model

Additional functions in the standard style.
Cassette lifting function for loading/unloading.

► Product Details