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State of the art
DLR-S412V00 Series

供應情形: 有現貨

型號: DLRC

300mm
  • Internal mini-environment cleanliness control verified by the CFD analysis with effective internal and external pressure-differential design to prevent from pollution in the wafer transfer process.
  • Optimized Robot+I30:I31 direction.
  • Complete data track to satisfy the requirement of predictive maintenance in Industry 4.0.