Fully automatic transmission system corresponding to 4Port SMIF POD.

Fixed wafer transfer process with vacuum and edge-clamp types available to customers depending on actual needs.

Internal mini-environment cleanliness control verified by the CFD analysis with effective internal and external pressure-differential design to prevent from pollution in the wafer transfer process.

Optimized moving trajectory of the robot, enabling a speedy and stable transfer with the curve interpolation for the shortest route.

Complete data track to satisfy the requirement of predictive maintenance in Industry 4.0.

Fixed wafer transfer process with vacuum and edge-clamp types available to customers depending on actual needs.

Internal mini-environment cleanliness control verified by the CFD analysis with effective internal and external pressure-differential design to prevent from pollution in the wafer transfer process.

Optimized moving trajectory of the robot, enabling a speedy and stable transfer with the curve interpolation for the shortest route.

Complete data track to satisfy the requirement of predictive maintenance in Industry 4.0.