產品描述

• up to 26 storage of FOUPs.
• Connect with vertical furnace equipment to achieve fully automation process.
• Utilizing advanced robotics and control software to achieve fully automated cassette storage, retrieval, and tracking operations.
• Cooperating with camera and console devices to achieve off-machine teaching.
• Purge system is available as an option at FOUP storage.
• Equipment structure and communication protocol comply with SEMI standards.